X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION ON THE CHEMICAL-STRUCTURE OF AMORPHOUS-SILICON NITRIDE (a-SINX)
Academic Article
Publication Date:
1989
abstract:
Amorphous silicon nitride a-SiNx (0
Iris type:
01.01 Articolo in rivista
Keywords:
Chemical structure; bonding configuration; Amorphous silicon nitride; XPS
List of contributors:
Ingo, GABRIEL MARIA
Published in: