X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION ON THE CHEMICAL-STRUCTURE OF AMORPHOUS-SILICON NITRIDE (a-SINX)

Articolo
Data di Pubblicazione:
1989
Abstract:
Amorphous silicon nitride a-SiNx (0
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
Chemical structure; bonding configuration; Amorphous silicon nitride; XPS
Elenco autori:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/178258
Pubblicato in:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A. VACUUM, SURFACES, AND FILMS
Journal