X-rays and electrical characterizations of ordered mesostructurated silica thin films used as sensing membranes

Mesoporous silica (MPS) thin films were characterized by X-ray analysis and electrical measurements to investigate possible correlation between structural order and best response of this kind of sensing material toward RH and alcohols vapours. Both energy dispersive Xray diffraction and X-ray reflectometry results have been discussed to describe the ordered porosity distribution in the amorphous film. A phenomenological trend of the resistive-type sensors response changing calcination has been found and related to the change in the porosity order of MPS thin film.