An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry

A Secondary Ion Mass spectrometry Investigation (SIMS) on cobalt oxide-based nanocrystalline thin films is presented. The coatings, whose composition ranged between CoO and Co3O4, were synthesized by Chemical Vapour Deposition (CVD) on Indium Tin Oxide (ITO) substrates, using a cobalt (II) beta-diketonate as precursor. The SIMS analysis revealed a satisfactory precursor conversion into the oxides and allowed distinction of regions in the films at different compositions. Film-substrate intermixing phenomena were evidenced and studied as a function of deposition temperature, film thickness and composition.