RF-sputtering fabrication of flexible glass-based 1D photonic crystals

Integration of photonic systems on deformable substrates has given rise to flexible photonics, a research field that has rapidly emerged in recent years. By adding mechanical flexibility to planar photonic structures, the spectrum of applications gains an incredible expansion. Flexible glassy photonic structures require a careful design and suitable fabrication protocols, in order to keep the optical and spectroscopic properties similar to their traditional rigid counterparts, even under mechanical deformation. Here, a radio frequency (RF) sputtering deposition protocol is developed for fabricating glass-based 1D photonic crystals on ultrathin flexible glass as well as on rigid substrates for comparison. Three different 1D multilayer structures, constituted by SiO2 and HfO2 layers, were first designed and modelled by Transfer Matrix Method to tailor targeted optical features (transmission windows, stopband ranges) and then fabricated by RF-sputtering technique. The structural, morphological, and optical features of the samples were investigated. In particular, the transmission spectra of the glass-based 1D photonic crystals, deposited on both flexible and rigid substrates, were acquired to highlight up to which extent the different nature of the substrates and the mechanical deformations (bending tests on the flexible structures) are not influencing the key spectral properties of the photonic crystals.