Strain analysis in sub-micron silicon devices by TEM/CBED

Conference Paper
Publication Date:
2001
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
ELECTRON-DIFFRACTION
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/210606
Book title:
MICROSCOPY OF SEMICONDUCTING MATERIALS 2001
Published in:
INSTITUTE OF PHYSICS CONFERENCE SERIES
Series