Strain analysis of deep sub-micron CMOS devices by TEM/CBED in the < 230 > zone axis

Conference Paper
Publication Date:
2001
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/210601
Book title:
PROCEEDINGS OF THE 5TH MULTINATIONAL CONGRESS ON ELECTRON MICROSCOPY