Strain in Silicon below Si3N4 Stripes, Comparison between SUPREM IV Calculation and TEM/CBED Measurements

Academic Article

Publication Date:

1997

Iris type:

01.01 Articolo in rivista

Keywords:

EDGE-INDUCED STRESS

List of contributors:

Armigliato, Aldo; Balboni, Roberto

Authors of the University:

BALBONI ROBERTO

Handle:

https://iris.cnr.it/handle/20.500.14243/198657

Published in:

DIFFUSION AND DEFECT DATA, SOLID STATE DATA. PART B, SOLID STATE PHENOMENA

Journal