Analytical electron microscopy of Si 1- x Ge x/Si heterostructures and local isolation structures
Academic Article
Publication Date:
1995
Iris type:
01.01 Articolo in rivista
Keywords:
MONTE-CARLO SIMULATION; X-RAY-MICROANALYSIS; THIN-FILMS; DIFFRACTION
List of contributors:
Armigliato, Aldo; Balboni, Roberto
Published in: