Deposition-etching competitive mechanism governing the structure and chemical composition of plasma deposited silicon-based materials.

Poster
Data di Pubblicazione:
1999
Tipologia CRIS:
04.03 Poster in Atti di convegno
Elenco autori:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/122082
Titolo del libro:
Absrtracts 1st International Workshop on Semiconducting and Superconducting Materials