Modulation of R.F. plasmas in the deposition of silicon based alloys: plasma diagnostics and material characterization

Conference Paper
Publication Date:
1991
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/121951
Book title:
Proceedings of XX International Conference on Phenomena in Ionized Gases, (ICPIG-XX)