Publication Date:
2000
abstract:
We report the fabrication process of capacitive ultrasonic transducers by surface micromachining techniques. In particular, we investigated the deposition step of the structural layer for the membranes. The final device was tested by impedance analysis.
Iris type:
01.01 Articolo in rivista
Keywords:
uktrasonic trnasducer; mems
List of contributors: