Data di Pubblicazione:
2000
Abstract:
We report the fabrication process of capacitive ultrasonic transducers by surface micromachining techniques. In particular, we investigated the deposition step of the structural layer for the membranes. The final device was tested by impedance analysis.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
uktrasonic trnasducer; mems
Elenco autori:
Notargiacomo, Andrea
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