Stability of EUV multilayer coatings to low energy alpha particles bombardment

Future solar missions will investigate the Sun from very close distances and optical components are constantly exposed to low energy ions irradiation. In this work we present the results of a new experiment related to low energy alpha particles bombardments on Mo/Si multilayer optical coatings. Different multilayer samples, with and without a protecting capping layer, have been exposed to low energy alpha particles (4keV), fixing the ions fluency and varying the time of exposure in order to change the total dose accumulated. The experimental parameters have been selected considering the potential application of the coatings to future solar missions. Results show that the physical processes occurred at the uppermost interfaces can strongly damage the structure. © 2013 Optical Society of America.