Data di Pubblicazione:
2016
Abstract:
A key characteristic of semiconductor nanowires (NWs) is that they grow on any substrate that can withstand the growth conditions, paving the way for their use in flexible electronics. We report on the direct growth of crystalline silicon nanowires on polyimide substrates. The Si NWs are grown by plasma-enhanced chemical vapor deposition, which allows the growth to proceed at temperatures low enough to be compatible with plastic substrates (350 degrees C), where gold or indium are used as growth seeds. In is particularly interesting as the seed not only because it leads to a better NW crystal quality but also because it overcomes a core problem induced by the use of Au in silicon processing, i.e. Au creates deep carrier traps when incorporated in the nanowires.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
silicon nanowires; flexible electronics; plasma-enhanced chemical vapor deposition; polyimide
Elenco autori:
Tian, Lin; DI MARIO, Lorenzo; Minotti, Antonio; Martelli, Faustino
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