Charging Effects and related Equivalent Circuits for Ohmic Series and Shunt Capacitive RF MEMS Switches
Contributo in Atti di convegno
Data di Pubblicazione:
2008
Abstract:
Abstract -- Charging effects in dielectrics are currently
considered as the major limiting factor for the reliability of
RF MEMS switches. In this paper, an ohmic series switch
and a shunt capacitive one are studied for modeling the
charging contributions due to the actuation pads used for
the electrostatic actuation of the device. For simulation
purposes, a lumped circuit based on equivalent capacitances
can be defined.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Charging
Elenco autori:
Catoni, Simone; DE ANGELIS, Giorgio; Bartolucci, Giancarlo; Proietti, Emanuela; Lucibello, Andrea; Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Proceedings of the 9th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2008