Study of ZrO2 film evolution by secondary ion mass spectrometry

The formation of thermally prepared ZrO thin films on nickel and titanium supports from a hydrated ZrOCl precursor was followed as a function of the calcination temperature by secondary ion mass spectrometry. Concentration depth profiles of selected species (e.g. O, Cl, ZrO, CH) were used to follow the process of film evolution. Although no reaction between the coating and support takes place, the zirconia films show differences in the distribution of main and trace components in the films as well as in the nature of the coating-support interface. The results are in agreement with those of former thermoanalytical and evolved gas analysis studies.