Nanostructuring through laser manipulation

We have developed a nanofabrication approach that exploits laser manipulation to guide neutral atoms, belonging to a well collimated beam, into regularly spaced positions prior to deposition onto a substrate. The method can be straightforwardly adapted to structured deposition in the low substrate coverage regime. Results demonstrate the achievement of isolated nanostructures with lateral size in the 10 nm range. © 2009 World Scientific Publishing Co. Pte. Ltd.