Metastable Phase of Ion Implanted Antimony in Silicon by Incoherent Light Annealing

Conference Paper

Publication Date:

1984

abstract:

Iris type:

04.01 Contributo in Atti di convegno

Keywords:

Ion Implanted Antimony

List of contributors:

Authors of the University:

RIZZOLI RITA

Handle:

Book title:

Energy pulse modification of semiconductors and related materials

Published in:

Journal