Process for physical vapor deposition of a chalcogenide material layer and chamber for physical vapor deposition of a chalcogenide material layer of a phase change memory device

Patent
Publication Date:
2005
Iris type:
06.01 Brevetto di invenzione industriale
Keywords:
sputtering; chalcogenide; phase change memories
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/308243