Reliable RF Microsystem Technologies for Space Applications

RF Micro-Electro Mechanical Systems (MEMS) have been developed during the last decade with several applications for commercial as well as space and military sub-systems [1-6]. Technological processes encompassing the utilization of typical microelectronic substrates like alumina, GaAs and Silicon have been considered for the realization of micro-switches by surface micromachining. True time delay lines (TTDL), single port multiple throw (SPMT), matrices and phase shifters take benefit from the low insertion loss, all passive and distortion-free environment offered by RF MEMS. Antenna re-configuration through digital phase shifters based on RF MEMS switches are currently studied.