Flexible photonics: RF-sputtering fabrication of glass-based systems operating under mechanical deformation conditions

We present the radio frequency sputtering fabrication protocols for the fabrication on flexible polymeric substrates of glass-based 1D photonic crystals and erbium activated planar waveguides. Various characterization techniques, such as atomic force microscopy and optical microscopy, are employed to put in evidence the good adhesion of the glass coating on the polymeric substrates. Transmittance measurements are performed on the multilayer structure and indicate that there are no differences between the samples deposited on the polymeric and SiO2 substrates, even after bending. Prism coupling technique is used to measure the optical parameter of the planar waveguide fabricated on flexible substrates. The 4I13/2 -> 4I15/2 emission band, detected upon TE0 mode excitation at 514.5 nm, exhibits the spectral shape characteristic of Er3+ ions embedded in a crystalline environment.