Data di Pubblicazione:
2017
Abstract:
Metallization of semiconductors surfaces via galvanic displacement
has proved its valor in all the microfabrication industry. Here is
proposed a novel application of this technique as suitable route to
deposit metal layers that serve as catalysts for graphene growth via
chemical vapor deposition. Furthermore, a computational approach
is described in order to understand and explain the behavior the two
systems show at room temperature. Closing remarks are devoted to
show the application of the cited process to micro structured
polycrystalline silicon.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
graphene; CVD; electrodeposition; XPS; Raman spectroscopy
Elenco autori:
Kaciulis, Saulius; Mezzi, Alessio
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