Synthesis and characterization of Co(Al(OSiMe3)4 and its application as CVD single-surce precursor

Conference Poster
Publication Date:
2004
Iris type:
04.03 Poster in Atti di convegno
Keywords:
metal oxide films; CVD
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/61835