Characterization of MEMS structures by microscopic digital holography

We propose the use of digital holography as a metrological tool for inspection and characterization of MEMS structures. We show that DH can be efficiently employed to assess the fabbrication process of microstructures as well as to test their behaviour in operative conditions.DH allows reconstructing amplitude and phase of microscopic objects and, compared to traditional microscopy, it provides quantitative phase dtermination