Cavities at the Si projected range by high dose and energy Si ion implantation in Si

Academic Article
Publication Date:
2009
abstract:
[object Object]
Iris type:
01.01 Articolo in rivista
Keywords:
Cavity growth; PAS; Silicon; SIMS; TED; XTEM
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/307112
Published in:
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Journal