Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers

A Mo-Si multilayer mirror has been used for determination of the ellipticity and higher-order content of a synchrotron beam. The method is based on the angular measure of multilayer reflectivity in the region of Bragg first- and second-order reflections. Beam parameters were derived by a fitting procedure. (c) 2006 Optical Society of America.