Pyroelectric effect Investigation on LiNbO3 crystal under humidity conditions using microheater

Pyroelectric effect (PE) under humidity conditions from the -Z surface of Lithium Niobate (LiNbO 3 ) crystal was investigated using a Fan shape microheater fabricated on the +Z surface of the crystal. Thermal analyses of the microheater were performed using COMSOL multiphysics and thermal sensor respectively. A resistive Aluminum (Al) sensor was integrated along the microheater in order to control the temperature variation effect from the microheater.