Multicolor Depth-Resolved Cathodoluminescence from Eu-Doped SiOC Thin Films

A very bright room-temperature cathodoluminescence (CL) signal, tunable in the visible range by changing the Eu2+ concentration, has been observed in Eu-doped SiOC films. Depth-resolved CL measurements demonstrate that a bilayer consisting of two SiOC films containing different Eu concentrations allows the continuous tuning of the Eu2+ emission from blue to green by changing the energy of the exciting electrons. Furthermore, the proper control at the nanoscale of the electron penetration depth allows to obtain a high-quality white light emission. The compatibility of SiOC films with Si technology opens the way to promising applications of Eu-based materials in lighting and display technologies.