Thin Films and Superlattice Synthesis

Thin film and superlattice deposition of perovskite and related mixed oxides for applications is an emerging and highly active field of research that is attracting increasing attention, because of their various technologically important properties in the strategic fields of environmental and sustainable energy applications. This chapter reviews the most common deposition techniques, namely molecular beam epitaxy, pulsed laser deposition and sputtering. Their potentials for the growth of epitaxial layers with desired properties will be compared. Several examples of thin films and heterostructures of complex oxides and their relevant properties will be discussed with respect to the growth process.