Analysis of dislocations and associated impurity atmospheres in bulk GaAs by means of SEM-EBIC measurements and DSL photoetching
Abstract
Publication Date:
1988
Iris type:
04.02 Abstract in Atti di convegno
Keywords:
GaAs; LEC; dislocations; EBIC; photoetching
List of contributors:
Frigeri, Cesare
Published in: