Glow discharge deposition of amorphous silicon films: Role of SiF4/SiH4 gas ratio and of plasma modulation

Conference Paper
Publication Date:
1994
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/120856
Book title:
Commission of the European Communities 12th European Photovoltaic Solar Energy Conference Proceedings