Mass spectrometric thermal evolution of novel indium metalorganic precursors for MOCVD

The thermal behaviour of dialkylindium-dialkylamides R2InNR'2 (R, R' = Me, Et) and dialkylindium-azolides R2InNR' (NR' = Pyrrole, Pyrazole) has been examined by a mass spectrometric thermal evolution technique, in the temperature range 30-400 °C. Data on volatility, identity of gasified molecules, threshold temperature and products of the decomposition processes are reported and discussed.