Al2O3 growth optimisation using aluminium dimethylisopropoxide as precursor as a function of reaction conditions and reacting gases
Academic Article
Publication Date:
2001
Iris type:
01.01 Articolo in rivista
List of contributors:
Carta, Giovanni; Battiston, Giovanni; Gerbasi, Rosalba; Rossetto, GILBERTO LUCIO; Zanella, Pierino
Published in: