MOCVD of Al2O3 films using new dialkylaluminum acetylacetonate precursors: growth kinetics and process yields
Academic Article
Publication Date:
2001
Iris type:
01.01 Articolo in rivista
List of contributors:
Carta, Giovanni; Battiston, Giovanni; Gerbasi, Rosalba; Porchia, Marina; Rossetto, GILBERTO LUCIO
Published in: