Nb-doped VO2 thin films prepared by aerosol-assisted chemical vapour deposition

Niobium-doped vanadium dioxide (VNbO, x = 0-0.037) thin films were prepared by aerosol-assisted chemical vapour deposition (AACVD) of vanadyl(IV) acetonate and niobium(V) ethoxide in ethanol. Samples were analysed by EDX, XRD, Raman, XPS and SEM. The analyses confirmed the deposition of niobium, even if no separated phase was formed; the morphological structure of the films was affected by the dopant presence. The thin films showed thermochromic behaviour, with a marked change in optical properties above and below the switching temperature. © Wiley-VCH Verlag GmbH & Co. KGaA, 2007.