Dependence of the transient enhanced diffusion, of B in Si, upon B concentration and ion implanted dose

Academic Article

Publication Date:

2002

Iris type:

01.01 Articolo in rivista

List of contributors:

Privitera, Vittorio; Mancini, Lucia; Mannino, Giovanni; Milita, Silvia; Solmi, Sandro; Servidori, Marco

Authors of the University:

MANNINO GIOVANNI

MILITA SILVIA

PRIVITERA VITTORIO

Handle:

https://iris.cnr.it/handle/20.500.14243/156363

Published in:

DIFFUSION AND DEFECT DATA, SOLID STATE DATA. PART B, SOLID STATE PHENOMENA

Journal