Excimer laser ablation of silicon carbide ceramic targets

The ablation mechanisms of ceramic silicon carbide targets were investigated for laser fluences up to 12 J/cm(2). Two different regimes were identified: the vaporization was the dominant process but, above approximately 3 J/cm(2), the plasma shielding of the laser beam took place and decreased the efficiency of the process. Moreover, after a few laser shots, the decomposition of the target material took place with the segregation of a carbon phase, as resulted from Raman microscopy measurements. Laser induced periodic structures were also evidenced on the inner laser spots at different fluences. The effects of the ablation mechanisms were correlated with the morphological properties of the films, in particular with the size and the number of the particulates. (C) 2002 Elsevier Science B.V. All rights reserved.