Morphology, Structure and Optical properties of Sol-Gel ITO Thin Films

The alkoxidic route and the spinning deposition were used to prepare monolayer sol _/gel indium tin oxide (ITO) films. The morphology and crystalline structure were investigated by cross-section transmission electron microscopy (XTEM) and atomic force microscopy (AFM). The ITO sol _/gel mono-layer contains three regions of different porosities. The basic crystalline structure is that of the In2 O3 lattice. The optical properties have been studied by optical transmission and spectroscopic ellipsometry. # 2003 Elsevier Science B.V. All rights reserved. Keywords: ITO films; Sol _/gel; Optical properties; Morphology; Structure