Design of IF Band-Pass Filters based on Micro-machined Resonators

Cascaded, two- and three-stages band-passs filters based on fixed-fixed beam micromechanical resonators have been designed for central frequencies F1= 10 MHz and F2 = 20 MHz. Quality factors Q = 500 have been predicted, under vacuum conditions, for a 3-dB bandwidth BW = 0.2%. Insertion losses in the order of 1 to 2 dB have been evaluated.