Data di Pubblicazione:
2004
Abstract:
A novel electro-acoustic chemical sensor based on
thin film bulk acoustic resonators (TFBAR) is presented.
The principle of operation is the same of the well known
quartz crystal micro-balance (QCM), where the frequency
of operation is extended from the limit of a few tens of
MHz to several GHz. The larger output sensor signals,
associated to higher frequency operation, is a condition to
develop devices with improved sensitivity. TFBARs have
been implemented on (001) Si wafers, using Si3N4/AlN
membranes, obtained by anisotropic chemical etching from
the back side of the Si substrate. The performances of the
TFBAR sensor have been tested using a thin Pd chemical
interactive membrane (CIM) deposited on the etched side
of the membrane and exposed to different concentrations of
hydrogen in nitrogen. Time response upon different cycles
of H2 adsorption and desorption are reported together with
the sensor calibration curve. The operation frequency of
the device, in the GHz range, allows to obtain large
responses. The device itself results robust in construction
and miniaturized in size. Time stability, repeatability and
sensitivity have been tested and reported.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Elenco autori:
DI PIETRANTONIO, Fabio; Cannatà , Domenico; Foglietti, Vittorio; Benetti, Massimiliano; Verona, Enrico
Link alla scheda completa:
Titolo del libro:
2004 IEEE Ultrasonics Symposium
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