Data di Pubblicazione:
2003
Abstract:
The recent activity performed on scanning capacitance microscopy is reviewed. The influence of surface states on measurements is described and reproducibility and sensitivity issues are addressed. Some examples of applications on devices and process characterisation and interpretation are shown. The application of the method to SiC is also discussed.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
SILICON
Elenco autori:
Priolo, Francesco; Raineri, Vito; Giannazzo, Filippo; Napolitani, Enrico; Mirabella, Salvatore
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