MOCVD of nanocrystalline Fe2O3-ZrO2 and Fe2O3-Y2O3-ZrO2 thin films

Nanocrystalline Fe2O3-ZrO2 thin films were synthesized via CVD ON QUARZ SUBSTRATES USING IRON(III) TRIS-(2,4 PENTANEDIONATE), AND ZIRCONIUM (IV) TRIS-ISOPROPOXY 2,2-6,6-TETRAMETYL-3,5-HEPTANEDIONATE AS PRECURSORS. iN ORDER TO ASSESS THE STABILIZATION OF CUBIC ZIRCONIA, Fe2O3Y2O3-ZrO2 FILMS WERE ALSO DEPOSITED; TO THIS AIM, YTTRIUM(III) TRIS-(2,4 PENTANEDIONATE) WAS ADDED TO PRECURSOR MIXTURE. FILM COMPOSITION, MICROSTRUCTURE AND MORPHOLOGY WERE INVESTIGATED AS A FUNCTION OF THE SYNTHESIS CONFDITIONS. IN PARTICULAR, THE FILMS WERE CHARACTERIZED BY X-RAY DIFFRACTION (XRD) , X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) AND ATOMIC FORCE MICROSCOPYB(AFM).