Advances in the definition of a drop-based functionalization protocol for CMOS-compatible MEMS biosensors

Smart, MEMS-based biosensors are a promising new platform for the delivery of diagnostic services, but inclusion of on-chip CMOS electronics requires the definition a CMOS compatible techniques for the bio-activation of the sensor surface. In this work, a comparison between a sensor functionalization procedure by complete immersion of the sensor chip or by exposure to a single drop of the reagents (the latter approach being more compatible with the presence of on-chip CMOS components) is presented. © 2014 Springer Science+Business Media.