Efficiency of VUV Optical Materials According to Variations in Deposition Conditions
Conference Paper
Publication Date:
2015
abstract:
Optical elements working at 121.6nm make use of Al and MgF2. We analyzed mono- and bi-layers of these materials, deposited by e-beam evaporation, and discussed how substrate temperatures and annealing affect their performances.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
Thin film; optical constant; ultraviolet; space
List of contributors: