Efficiency of VUV Optical Materials According to Variations in Deposition Conditions

Contributo in Atti di convegno
Data di Pubblicazione:
2015
Abstract:
Optical elements working at 121.6nm make use of Al and MgF2. We analyzed mono- and bi-layers of these materials, deposited by e-beam evaporation, and discussed how substrate temperatures and annealing affect their performances.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
Thin film; optical constant; ultraviolet; space
Elenco autori:
Autori di Ateneo:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/384262