On the use of NF3 plasmas for amorphous silicon ablation

Conference Paper
Publication Date:
1993
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/116738
Book title:
11th International Symposium on Plasma Chemistry, (ISPC-11) Proceedings IUPAC