Thin Film Deposition in Capacitively Coupled Plasmas Fed with Bis(dimethylamino)-dimethylsilane and Oxygen: An FTIR study

Academic Article
Publication Date:
2009
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/34512
Published in:
PLASMA PROCESSES AND POLYMERS (PRINT)
Journal