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Technology and Microwave Performances of Micromechanical Shunt Switches

Conference Paper
Publication Date:
2003
abstract:
Micromachined shunt switches in coplanar waveguide configuration for microwave applications have been realized and characterized. Issues have been addressed about the insertion loss, the reliability and the hysteretic response of the exploited devices. The biasing effect on the actuation voltage has been also investigated.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
MEMS; switches; microwaves
List of contributors:
Minucci, Gianluca; Marcelli, Romolo
Handle:
https://iris.cnr.it/handle/20.500.14243/151644
Book title:
Proceedings of the 4th Workshop on Micromachined Circuits for Microwave and Millimeter Wave Applications, MEMSWAVE 2003
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