Technology and Microwave Performances of Micromechanical Shunt Switches
Contributo in Atti di convegno
Data di Pubblicazione:
2003
Abstract:
Micromachined shunt switches in coplanar
waveguide configuration for microwave applications have been
realized and characterized. Issues have been addressed about
the insertion loss, the reliability and the hysteretic response of
the exploited devices. The biasing effect on the actuation voltage
has been also investigated.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
MEMS; switches; microwaves
Elenco autori:
Minucci, Gianluca; Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Proceedings of the 4th Workshop on Micromachined Circuits for Microwave and Millimeter Wave Applications, MEMSWAVE 2003